Dry Etching Technology for Semiconductors - Hardcover >
/ Dry Etching Technology for Semiconductors - Hardcover

Dry Etching Technology for Semiconductors - Hardcover

Regular price$273.78
/
(Tax included. Shipping calculated at checkout.)
✔ Authenticity Guaranteed — Verified Designer Goods
✔ 100% Money-Back Guarantee on Eligible Items
✔ Prices Displayed in Your Local Currency
✔ Final Price = No Surprise Import Fees
✔ Complimentary Insured Worldwide Shipping on Qualifying Orders
✔ Select Collector & Specialty Pieces May Require Secured Delivery Handling
Our authentication process ensures every item meets strict luxury verification standards. Learn more
Complimentary worldwide shipping on qualifying orders

by Kazuo Nojiri (Author)

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.

Back Jacket

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.

  • Provides a comprehensive, systematic guide to dry etching technologies, from basics to latest technologies;
  • Enables beginners to understand the mechanisms of dry etching, without complexities of numerical formulas/equations;
  • Describes etching processes for all materials which are used in semiconductor devices, explains key etching parameters for each material, and explains why a particular plasma source and etching gas chemistry is used for each material;
  • Discusses the device manufacturing flow and explains in which part of device manufacturing dry etching is actually used;
  • Describes the types and plasma generation mechanism of etching equipment which are actually used in semiconductor fabs, such as CCP (Capacitively Coupled Plasma), Magnetron RIE (Magnetron Reactive Ion Etching), ECR (Electron Cyclotron Resonance) Plasma, and ICP (Inductively Coupled Plasma).

Author Biography

Kazuo Nojiri is a CTO of Lam Research Japan. He has 37 years of experience in semiconductor industry. Prior to joining Lam in 2000, he worked for Hitachi Ltd. for 25 years, where he held numerous management positions for Dry Etching and Device Integration. He is also known as a pioneer in the research field of charging damage. He published 38 technical papers and 3 books. In 1984 he was awarded the Okouchi Memorial Prize for the development of ECR plasma etching technology.

Number of Pages: 116
Dimensions: 0.38 x 9.21 x 6.14 IN
Illustrated: Yes
Publication Date: November 03, 2014
  • In stock, ready to ship
  • Backordered, shipping soon
Shop with Confidence
  • ✔ Authenticity Guaranteed — Verified Designer Goods
  • ✔ Sourced from Authorized European/U.S. Luxury Distributors
  • ✔ Secure Checkout — SSL Encrypted Payments
  • ✔ Fast Global Delivery — 3–11 Business Days
  • ✔ Easy Returns on Eligible Items
  • ✔ 100% Money-Back Guarantee — Full Refund if Not Satisfied
Verified Trust Rating: 91/100
Amazon American Express Apple Pay Bancontact Diners Club Discover Google Pay Mastercard PayPal Shop Pay USDC Visa SSL Secure
Amazon Pay Logo Fast checkout with Amazon Pay. Use your Amazon account to skip entering shipping or card info.
Trusted by discerning buyers worldwide — secure, verified luxury sourcing

AUTHENTICITY GUARANTEED

Reserved for you — complete your purchase to secure this piece.

Authorized Designer Inventory Secure & Encrypted Checkout Tracked & Insured Delivery

OFFICIALLY AUTHORIZED RESELLER

Discover Officially Authorized Authentic Items at STORE7994.com - Certificates Available on Request!

Independently verified for store quality and customer safety.
Trust score: 91/100

All designer items offered by STORE 7994 are sourced from trusted luxury distributors and verified through independent authentication services.

Learn how STORE 7994 authenticates luxury items

Guaranteed Authentic — Includes Brand Documentation & Third-Party Verification Options.

Shipping information

  • Free Shipping* on all orders over $300 USD to most countries* Estimated delivery: 2-5 business days Mon-Sat to U.S., CA, EU etc.
  • Tracking available: DHL Express
  • Store 7994 Shipping policy
  • Global delivery in 3–9 business days (location dependent).
  • Free Worldwide Shipping $300+. International duties & VAT are calculated by destination country and may be collected upon delivery. UK orders are subject to 20% import VAT upon delivery.

Our innovation isn’t just in the brands we carry — it’s in the way we connect them. From our automation engine that keeps collections globally updated to our commitment to authenticity-first presentation, STORE 7994 exists where timeless design meets modern precision.

Every product we offer is:
Elevated · Intentional · Exclusive · Authentic

STORE 7994 is an authorized reseller of luxury fashion houses. Certificates and proof of authenticity are available to brand owners and partners upon request.

This site is protected by hCaptcha and the hCaptcha Privacy Policy and Terms of Service apply.

Returns & Refunds

We want you to shop with confidence at STORE 7994. If your purchase does not meet expectations, eligible items may be returned under the conditions below.

Return Eligibility
Items must be unused, unworn, and in original condition with all tags, packaging, and accessories included. Items showing any signs of wear or damage will not be accepted.

Return Window
Return requests must be made within 14 days of delivery.

Return Shipping
Customers are responsible for return shipping costs unless the item is defective, damaged, or incorrect.

Luxury Items
Items valued over $1,000 may be subject to a 7% restocking fee upon approved return.

Non-Returnable Items
For hygiene and product integrity reasons, the following items are final sale once opened or used:

• Underwear
• Fragrances
• Any worn or used items

Made-to-Order Items
Custom-designed products, including STORE 7994 hoodies, are made exclusively for each customer and are final sale. These items are not eligible for return or exchange unless defective or incorrect.

If you receive a defective or incorrect item, please contact us and we will make it right.

International Shipping & Duties
Many of our products ship directly from trusted international partners. Any applicable customs duties or import taxes are calculated at checkout and are non-refundable, even if the item is returned.

Returns & Associated Fees
All approved returns are subject to a $24 return processing fee. For international orders, duties, taxes, and return fees will be deducted from the original payment.

Shipping Policy
Complimentary shipping is offered on orders over $300. Orders below this threshold are subject to standard shipping rates at checkout.